In this study, we develop a clamped–clamped beam-type piezoelectric vacuum pressure sensing element.The clamped–clamped piezoelectric beam is composed of a PZT layer and a copper substrate.A Melatonin Kids pair of electrodes is set near each end.
An input voltage is applied to a pair of electrodes to vibrate the piezoelectric beam, and the output voltage is measured at the other pair.Because the viscous forces on the piezoelectric beam vary #8 LIGHT BLOND at different air pressures, the vibration of the beam depends on the vacuum pressure.The developed pressure sensor can sense a wide range of pressure, from 6.
5 × 10−6 to 760 Torr.The experimental results showed that the output voltage is inversely proportional to the gas damping ratio, and thus, the vacuum pressure was estimated from the output voltage.